The invention relates to a method for preparing a vapor deposition mask, which mainly solves the existing OLED manufacturing technology, evaporation of organic particles due to shadowing mask opening wall technology problems and could not reach the substrate, the invention adopts a method for preparing a mask evaporation, the evaporation of metal plate four plating mask shape shape, the mask has ITO surface layer and the evaporation surface layer two layer structure, wherein the mask plate has a through opening ITO surface layer and the evaporation surface layer, the surface layer of the opening is smaller than the size of ITO size evaporation surface layer opening, transverse sections along the thickness the direction of the mask on the ITO surface layer opening shape is trapezoid, the evaporation surface layer opening shape scheme for rectangular, better solves the problem, can be used for organic light emitting two tubes in industrial production. ?
【技术实现步骤摘要】
【技术保护点】
一种蒸镀用掩模板的制备方法，采用电镀工艺，包括如下几个步骤：a)?选取厚度为15～200μm金属或合金薄板，其上具有梯形开口，通过电铸工艺制得蒸镀用掩模板的ITO面层，掩模板的均匀性小于5%，表面光亮度为一级光亮；b)?对掩模板ITO面层进行二次电铸，在原有开口的基础上形成一层具有开口的加厚层，即为蒸镀面层；其中，所述掩模板形状为四边形的金属板，所述掩模板具有ITO面层和蒸镀面层两层结构，所述掩模板上具有贯通ITO面层和蒸镀面层的开口，ITO面层的开口尺寸小于蒸镀面层的开口尺寸，沿掩模板的厚度方向的横向剖面上，ITO面层开口形状为梯形。
【技术特征摘要】
【专利技术属性】
技术研发人员：魏志凌，高小平，潘世珎，郑庆靓，
申请(专利权)人：昆山允升吉光电科技有限公司，
类型：发明
国别省市：
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