电容式压力传感器及其制备方法技术

一种电容式压力传感器，包括：第一柔性衬底(101)、第一石墨烯电极板(102)、绝缘介质层(103)、第二石墨烯电极板(104)和第二柔性衬底(105)，其中，该绝缘介质层(103)用于将第一石墨烯电极板(102)和第二石墨烯电极板(104)隔离且保持预定间隔；第一石墨烯电极板(102)和第二石墨烯电极板(104)中分别包括至少一路串联的石墨烯电极，第一石墨烯电极板(102)的至少一路串联的石墨烯电极和第二石墨烯电极板(104)的至少一路串联的石墨烯电极交叉排列，并且该电容式压力传感器的多个电容中的每个电容包括第一石墨烯电极板(102)和第二石墨烯电极板(104)中位于交叉位置的一对相向面对的石墨烯电极。还提供了一种电容式压力传感器的制作方法。

Capacitive pressure sensor and its preparation method

A capacitive pressure sensor consists of a first flexible substrate (101), a first graphene electrode plate (102), an insulating medium layer (103), a second graphene electrode plate (104) and a second flexible substrate (105), in which the insulating layer (103) is used to isolate the first stone plate (102) and second graphene electrode plates (104) and maintain it. A predetermined interval; the first graphene electrode plate (102) and the second graphene electrode plate (104) include at least one series of graphene electrodes, and at least one graphene electrode in series in series of the first graphene electrode plate (102) and at least one of the second graphene electrode plates (104) are arranged in a series of graphene electrodes, and the capacitance is arranged. Each capacitance in a plurality of capacitors of the pressure sensor consists of a pair of graphene electrodes at the intersection of the first graphene electrode plate (102) and the second graphene electrode plate (104). A method of making capacitive pressure sensors is also provided.

【技术实现步骤摘要】
【国外来华专利技术】PCT国内申请，说明书已公开。

【技术保护点】
PCT国内申请，权利要求书已公开。

【技术特征摘要】
【国外来华专利技术】PCT国内申请，...

【专利技术属性】
技术研发人员：张波，张旻，张臣雄，
申请(专利权)人：华为技术有限公司，
类型：发明
国别省市：广东,44