The present invention relates to a micro inertial sensor embedded with a laterally movable electrode. The existing sensors have large noise, poor stability, small measuring range and wide bandwidth. The present invention includes a first substrate and surface detected by cross fixation on the comb shaped electrode, fixed on the first substrate sensor, fixed mass anchor, anchor of the second substrate suspended above the first substrate strip sensor mass block, and the anchor bar will sensor sensitive device quality block connected U shaped supporting beam, sensor connected to the outer side of the movable electrode comb shaped double gate oscillator, the linear sensor mass block and double gate shaped oscillator is connected to the U type sensor connecting beam, fixed mass of comb fixed electrode, sensor external lead electrode, electric insulating layer, wire and wire electrode drive drive. The micro inertial sensor of the invention has novel structure, high resolution and sensitivity.
【技术实现步骤摘要】
【技术保护点】
１．嵌入横向可动电极的微惯性传感器，包括第一基板及其上表面的检测用交叉梳齿状固定对电极、固定于第一基板上的敏感器锚点、固定质量块锚点、第二基板的悬于第一基板上方的条形敏感器质量块、将敏感器锚点和条形敏感器质量块相连的Ｕ形敏感器支撑梁、外侧连接梳形可动电极的双栅形振子对、将条形敏感器质量块和双栅形振子对相连的Ｕ形敏感器连接梁、固定质量块上的梳形固定电极、敏感器外部引出电极、电绝缘层、驱动导线和驱动导线引出电极，其特征在于：所述的条形敏感器质量块位于第二基板中心，条形敏感器质量块由矩形块和条形敏感器质量块矩形凸起组成，沿着条形敏感器质量块的横向中心线对称设置有条形敏感器质量块矩...
【技术特征摘要】
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