The invention discloses a good cleaning effect, do not need special personnel placed ultrasonic cleaning line, comprises a frame, the frame is provided with a cleaning tank and ultrasonic cleaning pool with phase vibration box, vibration of the ultrasonic vibration box is arranged on the surface of at least one pair of guide grooves are arranged on the frame. In front of each guide groove are respectively arranged for clamping and conveying the sheet to be cleaned, the conveyor belt, the conveyor belt or near surface motion under the conveyer belt is arranged in the guide groove corresponding, and the attack surface is higher than that of surface vibration, the sheet to be cleaned next to the vibration surface. The invention is mainly used for cleaning silicon wafers.
【技术实现步骤摘要】
【技术保护点】
１．超声波清洗线，包括：机架，机架上设置有清洗池以及与清洗池相配合的超声波震动盒，其特征在于：所述超声波震动盒的震动面上设置有至少一对导槽，所述的机架上正对着每个导槽分别设置有用于夹持并输送待清洗片材的上、下输送带，其中，靠近震动面的上输送带或下输送带放置在相应的导槽中，并且其迎物面高于震动面，使得待清洗的片材紧挨着震动面。
【技术特征摘要】
【专利技术属性】
技术研发人员：陈宏，
申请(专利权)人：张家港市超声电气有限公司，
类型：发明
国别省市：32
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