The invention relates to a method for rapidly growing ultrathin wall Zinc Oxide single crystal micron tube by in-situ optical vapor phase supersaturation precipitation method, which belongs to the field of semiconductor material preparation. The following steps are as follows: preparing the ZnO powder with uniform particle size, obtaining the dense plain billet with the ZnO powder under the 70MPa static pressure, grinding one end of the vegetarian rod into a conical shape and installing it at the focus of the halogen lamp of the optical floating zone furnace, directly prefiring the plain embryo bar, the prefiring power of 1200 2400W, pre firing time of 6 hours and 2 preheating hours; After the burning, the power of the halogen lamp was raised to grow Zinc Oxide micron tube, the growth power was 3600 4200W, the growth time was 8 and 10 hours, and the ultrathin wall Zinc Oxide single crystal microtube with complete morphology and hexagonal geometry was obtained. The thickness of the wall can reach to 450nm, and its diameter to 230 u m. The method can rapidly grow a high quality ultra thin wall Zinc Oxide single crystal microtube to achieve structural semiconductor fabrication. It has potential applications in the field of photoelectric detection and micro cavity laser output.
【技术实现步骤摘要】
一种原位光学气相过饱和析出法快速生长超薄壁氧化锌单晶微米管的方法闫胤洲胡烁鹏王越王强邢承蒋毅坚
本专利技术属于半导体材料制备
,通过原位光学气相过饱和析出法快速生长高质量超薄壁氧化锌单晶微米管。
技术介绍
ZnO作为II-VI族宽禁带氧化物半导体代表材料,常温下禁带宽度约为3.37eV,激子束缚能约为60meV,在紫外/蓝光LED,紫外激光发光器件,紫外日盲光电探测器,透明导电氧化物电极,太阳能电池,气体传感器,场效应晶体管等领域具有重要的应用。近年来研究发现氧化锌可制备处微米管状结构,其截面为正六边形,是一种潜在的低阈值紫外激光微腔,相较于传统珐珀腔,微米管结构支持的光波导型光学回音壁模式具有更高的品质因子和更小的模式体积,可实现超低阈值紫外激光激射,为片上集成紫外微米激光器的研发奠定了基础。实现氧化锌单晶微米管生长主要有水热法,化学气相沉积法,微波加热法等,其中JiabiaoLian等人采用水热法(Template-freehydrothermalsynthesisofhexagonalZnOmicro-cupsandmicro-ringsassembledbynanoparticles.Crystengcomm.2011,13(15),4822)生长出了氧化锌的微米管,生长过程在低于100℃的温度下进行,反应温度较低,但是步骤复杂,对于溶液的酸碱度、温度要求比较高,反应时间需要15-20小时,而且由于催化剂和溶液的影响,生长中不可避免会引入杂质,且微米管的直径通常<40μm,结晶质量一般较差。YouguoYan等人采用了化学气相沉 ...
【技术保护点】
1.一种原位光学气相过饱和析出法快速生长超薄壁氧化锌单晶微米管的方法,其特征在于,包括如下步骤:(1)将一端磨成圆锥形的氧化锌粉料制备的素胚棒直接置于光学浮区炉卤素灯光聚焦处,进行料棒光学预烧;预烧过程中卤素灯功率在1200‑2400W之间,预烧时间在2‑6小时之间,(2)光学预烧完成后直接提高卤素灯功率至3600‑4200W,生长时间为8‑10h,获得超薄壁的氧化锌单晶微米管;微米管壁厚为400~800nm;整个过程中素胚棒的旋转速率为5‑20rpm,空气以1‑4L/min的速率泵入浮区炉腔内。
【技术特征摘要】
1.一种原位光学气相过饱和析出法快速生长超薄壁氧化锌单晶微米管的方法,其特征在于,包括如下步骤:(1)将一端磨成圆锥形的氧化锌粉料制备的素胚棒直接置于光学浮区炉卤素灯光聚焦处,进行料棒光学预烧;预烧过程中卤素灯功率在1200-2400W之间,预烧时间在2-6小时之间,(2)光学预烧完成后直接提高卤素灯功率至3600-42...
【专利技术属性】
技术研发人员:闫胤洲,胡烁鹏,王越,王强,邢承,蒋毅坚,
申请(专利权)人:北京工业大学,
类型:发明
国别省市:北京,11
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